S

Classe 9

Downloadable software used for wafer robot moving or EFEM (Equipment Front End Module) operation in the field of semiconductors; downloadable firmware used for wafer robot moving or EFEM (Equipment Front End Module) operation in the field of semiconductors; data media, namely, update software data in the field of semiconductors and robot pathway data recorded on computer media and digital storage media; optical fibers; light conducting filaments; cables, electric; circuit boards; semiconductors; silicon wafers in the nature of silicon slices; semiconductor devices; electrical, temperature, optical sensors; electronic controls for motors; electronic controllers for servo motors; programmable logic controller; programmable electronic controllers for solenoid valve (excluding game apparatus); electrical distribution boxes electric control box in the nature of electric control panels; electricity distribution consoles; vibration sensor for electronic mechanics; control cabinets specially adapted for power control of robot in the field of semiconductors