Classe 7
Machines and machine tools for microelectronicsfor the productiontreatmenttransportprocessing of electronic components in the fields of medical equipment techniques technologybiotechnologymicrosystem techniques technologysemiconductor technologynanotechnologywafer bonding technologylithography equipment technology; machines for manufacturing electronic components and optical and technical devicesactive and passive electronical components in the nature of micro-electromechanical systems (MEMS)microchipsmemory chipsdiodeslight-emitting diodestransistorsoptical lenses; precision machines as well as spare parts for the same for use with semiconductor technologymicroelectronicsmedical equipmentbiotechnologymicrosystemsnanotechnology; self-regulating pumpsresist dispense pumps
Classe 9
Scientific apparatus and instruments for microelectronicsfor medical equipment techniquesbiotechnologymicrosystem techniquessemiconductor and nanotechnologyexposure systems for 1X lithography applicationsmask aligners and contact and proximity printers and devices for joining one or multiple substrates temporarily or permanentlysubstrate bonding systems comprised of UV-radiation/UV-light source devicesheaterspneumatic and hydraulic piston setups and spindles; surveying deviceselectricphotographicopticalmeasuringsignalingmonitoring devicesin particular for precision systems in the semiconductor technologyin microelectronicsin medical equipment techniquesbiotechnologymicrosystem techniquesnanotechnologyfront to backside alignment measurement systems including at least one of measurement apparatus that detects a reference pattern on both the front and on the backside of a substrate and stages that allow for moving the substrate so that the measurement apparatus can detect the pattern at the desired location of the substratecomputer hardware that can analyze the data and calculate misalignment values between the pattern on the front and backside; chipsintegrated circuits; downloadable computer operation programs for use in the operation of microelectronics and semiconductor fabrication and processing apparatuses; peripheral equipment for computers; data processing unitsdata processing devices and computers; downloadable computer software for analyzing wafer bonding results and pattern alignment of substrates; scientific diagnosis devices in bio-chip formatDNA microarraysmicrofluidic chipsprotein microarrays comprising oligonucleotide-arraysminiaturized immunologic test-arrayssubstance librariescombinatorial substance libraries on chip surfaces for scientific purposes; electric systems for remote controlled industrial operational processeslaboratory robots; protective masks and filters therefor for use with photographic and photolithographic equipment and photographic film processing; devices for telecommunicationstelegraphic transmitting apparatustelecopying devicestelephones; semiconductors; capillary reagent tubes for laboratory use; electric monitoring devicesoscillographsindicatorssurveying instruments; couplers being data processing equipment; furniture especially made for laboratories; laser for non-medical purposes; reading devices being data processing apparatus; measuring instrumentsnamely laser measuring devices; measuring deviceslaser measuring devices; material testing instruments and machinesmachines for testing bonding strength in bonded substrates; optical apparatus and instrumentsmicroscopes; photographic apparatus and instrumentscameras; physical and chemical laboratory apparatus and instrumentsmetrology toolsdebonding tools based on chemical assisted debonding; precision measuring devices for measuring wafter curvatureswafer warpagesstructural misalignmentsrun-out errors; projectorsdigital micromirror device (DMD) based illumination devices; protective clothingin particular for protection against accidents in clean-rooms; silicon wafers; probes for scientific purposes; spectroscopes; range finders for photographic equipment
Classe 42
Scientific and technological services and research and design relating thereto in the field of engineering; industrial analysisindustrial research and industrial design services in the field of engineering; design and development of computer hardware and software; scientific laboratory services; engineering; computer programming; engineering and scientific laboratory services; providing and conducting evaluationsestimatesresearch and reports in the scientific and technological fieldsanalysis and metrology of coatingimprintingembossing bondingdebondingalignment quality of wafers and chips; technological consultancy in the field of medical and scientific equipment; software as a service (SaaS) featuring software for metrologyanalyzing wafer warpagebond qualityrun-out qualityimprinting qualityembossing quality; platform as a service (PaaS) featuring software for metrologyanalyzing wafer warpagebond qualityrun-out qualityimprinting qualityembossing quality; conducting technical project studies relating to medical and scientific equipment; material testing; calibration; construction drafting; research and development of new products for others; research in the field of physics; mechanical research; engineering services for others; product development of precision systems and devices for the semiconductor technology; product development of devices for microsystem techniquesmicroelectronicsmedical techniquesbiotechnologytelecommunicationwafer bondinglithography equipment; providing systems technology solutions for sensorics and diagnosticsin particular of biology and medicine for others; research work in the field of bio-technology; mechanical research work in the field of microsystem technologynanotechnologywafer bondinglithography equipment; mechanical and scientific research work in the field of bio-sensorics and chemical sensorics; technological consulting for third parties concerning handling production plants and process equipment; research servicesmicrosystem technology and nanotechnology research services; providing temporary use of online non-downloadable computer programs for data processing