Classe 7
Machines for plasma surface treatment; machines for chemical surface treatment; machines for large area coating using sputter depositionnamely horizontal or vertical or tilted sputtering deposition and machines for vacuum deposition for coating of layersin particular transparentconductivemetallicsemi-conductivenon-conductivedielectrictransparent and electrically conductive or passivating layersin particular using physical or chemical vapour deposition; machinesphysical or chemical vacuum deposition machines for coating planar and three-dimensional substrates and machines for multi-layer vacuum deposition for coating of metals and ceramics; machines for vacuum deposition for coating of layersin particular transparentconductivemetallicsemi-conductivenon-conductivedielectrictransparent and electrically conductive or passivating layersin particular using physical or chemical vapour deposition on substrates; machines for large area coating using vacuum depositionnamely horizontal or vertical or tilted sputtering deposition for vacuum deposition for coating of metalmetal alloysmetal oxides or metal nitrides; machines for the production of optical storage media and optical storage discs for high-definition and ultra-definition resolution content for vacuum deposition for coating of metalsmetal alloysmetal oxides or metal nitrides; machines for vacuum deposition for coating of metalsmetal alloysphase transition ceramics or semiconductors; combinations of machines for automation of substrate handling and processing for the refinement of planar and three-dimensional substrates namely for vacuum deposition for coating of metalsmetal alloysmetal oxidesmetal nitrides semiconductors; machines for cleaning glass or silicon substrates; in-line machines for cleaning thin-film solar cells; machines for cleaning of substratessemiconductor and glass wafers and machines for cleaning for single side and double side processing of glass and silicon substrates; machines for chemical cleaning of mono and multi crystalline silicon; machines for etching thin-film solar cells; machines for etching substratessemiconductor and glass wafers; in-line machines for acidic etching or alkaline etchingfor single side and double side processing; machines for chemical etching of mono and multi crystalline silicon; machines for injection molding; machines for replication being manufacturingnamely manufacturing of optical discs including CDDVDHD-DVD and other types of optical discs and optical storage media; machines for lacquering; machines for embossing; machines for nano imprint lithography by wet embossing; machines for laser exposure changing a material from an amorphous structure into a crystalline structure; machines for photoresist developing in the nature of laser exposure or laser beam recording; machines for laser beam recordingfor the production of master disc for the replication of optical disc or optical storage media; machines for wet chemical treatmentmachines used for wet-chemical etchingcleaningcoating and drying of substrates; machines for wet chemical deposition; automated cargo handling apparatusnamely for transportingconveyingliftinghandlingloading and packaging objectspartsworkpiecesmaterials; moving and handling equipmentnamely handling arms conveyors being cargo handling machinesconveyor belts and industrial robots; mechanisms for transportationpneumatic transporters; combinations of industrial machines and automated handling apparatus for performing several processes regarding treatment of materialsnamely for automation of substrate handling and processing for the refinement of planar and three-dimensional substratesnamely for vacuum deposition for coating of layersin particular transparentconductivemetallicsemi-conductivenon-conductivedielectrictransparent and electrically conductive or passivating layersin particular using physical or chemical vapour depositionfor surface treatment of substratesfor lacqueringspray-coating of substrates with UV curable lacquer or solvent based lacquerfor UV-curing or drying; combinations of machines for manufacturing silicon solar cellsnamely for automation of substrate handling and processingfor vacuum deposition for coating of transparentconductivemetallicsemi-conductivenon-conductivedielectrictransparent and electrically conductivepassivating layersfor wet chemical treatment of substratesfor laser ablationelectrical insulatingfor structuringfor contact openingfor contact firing of substrates and screen print and for thermal treatment of substrates; combinations of industrial machines and automated handling apparatus for performing several processes regarding treatment of materialsnamely for manufacturing thin film solar cellsnamely for automation of substrate handling and processingfor vacuum deposition for coating of substratesfor wet chemical treatment of substratesfor laser ablationsurface structuringelectrical insulation or cell formation of substratesthermal treatment of substrates and for lamination or contacting substrates; in line machine systemsmachines and machine tools for coatingsurface treatmentthermal treatmentplasma treatmentsprayingvacuum depositionlacqueringcleaningetching in the nature of in-line machines for wet chemical treatmentfor etchingcleaningcoating and drying thin-film solar cells or glass or silicon substratessemiconductor devices and optical components
Classe 9
Downloadable industrial automation software for use in controlling automated machines; downloadable and recorded software featuring artificial intelligence and machine learning for use in the operation of automated machines; downloadable software featuring artificial intelligence for use in condition monitoring of machines; Downloadable factory automation softwaresoftware to integrate manufacturing machine operationstrack problems and generate production reports; Measuring apparatus and instruments for measuring layer thicknessreflection of light and electromagnetic wavessound wavestransmission of light and electromagnetic wavesspectrometers; measuring apparatus and instruments for measuring sheet resistance with two or four pin probes or eddy current probes; measuring apparatus and instruments for measuring material composition of optical storage mediaCDsDVDsglasssolar cellsplanar and three-dimensional substratesin particular plasticglassceramic or metal substrateslayersin particular transparentconductivemetallicsemi-conductivenon-conductivedielectrictransparent and electrically conductive or passivating layerssingle and polycrystalline thin films mediaUV curable lacquermetalsmetal alloysmetal oxides or metal nitridesthin-wall optical parts and micro-structured partsmicrofluidic devicesmicro electro mechanical structures; magnetic sensorssensors for measuring the magnetic field ofanisotropic magnetoresistancegiant magnetoresistance and tunnel magnetoresistance structuressemiconductor devices and optical componentsnone of which are for medical purposes
Classe 20
Receptacles of plastic for commercial useplastic containers for storingtransporting and processing substratesin particular silicon wafers
Classe 37
Installationrepair and maintenance of machines for vacuum coatingthermal treatmentlacqueringchemical treatment media supplyautomation and combinations thereof as well as component parts of those machines; installationrepair and maintenance of measuring apparatus and instruments being parts of machines and/or machine combinations; installationrepair and maintenance services in relation to measuringdetectingmonitoring and controlling devices