MKS

Classe 9

Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement and control of fluid pressure, vacuum and flow; Residual gas analyzers; Process and optical monitors for detecting gas compositions within a process chamber; Quadrapole mass spectrometers; Electrical analog-digital interface adapters, gateway and card modules; Radio frequency, direct current and microwave power supplies and generators; Power generators for converting energy from chemical gas reactions to power for running processes with a process chamber; Thermal, electrical and pressure-based mass flow controllers; Gas pressure valves for controlling and shutting off gas flow; Vacuum and gas component heaters; Gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; [Gas filters and purifiers;] Heaters; Helium leak detectors; Gas detector and analyzer for monitoring gas emissions for safety and compliance; Calibration equipment for pressure and flow transducers, and for flow meters; Vacuum gauge systems, vacuum gauges, transducers, metal pipe and hose fittings, pressure valves, heater jackets and traps for capturing waste materials exiting from a process chamber; Liquid delivery system composed primarily of a pump, vaporizer, and power controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; In situ flow verifier of process or purge gases; Vacuum sensing and switching equipment, namely, vacuum sensor switches; [Hardware and software for measuring the transmissivity, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same;] Software for operating optical spectrometers; Software for operating quadrapole mass spectrometers; Software for determining the presence and measurement of residual contaminants in a semiconductor process; Electronic control accessories, namely, micro-processor based data communication devices for communicating between quadrapole mass analyzers and a computer